Micromachines

Particle counting serves as a pivotal constituent in diverse analytical domains, encompassing a broad spectrum of entities, ranging from blood cells and bacteria to viruses, droplets, bubbles, wear debris, and magnetic beads. Recent epochs have witnessed remarkable progressions in microfluidic chip technology, culminating in the proliferation and maturation of microfluidic chip-based particle counting methodologies. This paper undertakes a taxonomical elucidation of microfluidic chip-based particle counters based on the physical parameters they detect. These particle counters are classified into three categories: optical-based counters, electrical-based particle counters, and other counters. Within each category, subcategories are established to consider structural differences. Each type of counter is described not only in terms of its working principle but also the methods employed to enhance sensitivity and throughput. Additionally, an analysis of future trends related to each counter type is provided. Full article

Due to the excellent properties of carbon fiber-reinforced polymers (CFRPs), such as high strength and strong corrosion resistance, the traditional water-jet-guided laser (WJGL) technology has problems with fiber pull-out and has a small cutting depth when processing CFRPs. Therefore, in this study, we used high-power water-jet-guided laser (HPWJGL) technology to perform groove processing experiments on CFRPs. The effects of four key process parameters, high laser power, pulse frequency, feed rate, and water-jet pressure, on the cutting depth were investigated by a single-factor experiment. The formation mechanism of groove cross-section morphology and the processing advantages of high-power water-jet-guided lasers were analyzed. On this basis, the mathematical prediction model of cutting depth was established by using the response surface method (RSM), and the optimal combination of process parameters was obtained. The mathematical prediction model was verified by experiments, and the error was only 1.84%, indicating that the model had a high reference value. This study provides a reference for the precision machining of HPWJGL technology. Full article

A super multi-view (SMV) near-eye display (NED) effectively provides depth cues for three-dimensional (3D) display by projecting multiple viewpoint or parallax images onto the retina simultaneously. Previous SMV NED have suffered from a limited depth of field (DOF) due to a fixed image plane. In this paper, a holographic SMV Maxwellian display based on depth segmentation is proposed to enhance the DOF. The proposed approach involves capturing a set of parallax images and their corresponding depth maps. According to the depth maps, the parallax images are segmented into N sub-parallax images at different depth ranges. These sub-parallax images are then projected onto N image-recording planes (IRPs) of the corresponding depth for hologram computation. The wavefront at each IRP is calculated by multiplying the sub-parallax images with the corresponding spherical wave phases. Then, they are propagated to the hologram plane and added together to form a DOF-enhanced hologram. The simulation and experimental results are obtained to validate the effectiveness of the proposed method in extending the DOF of the holographic SMV displays, while accurately preserving occlusion. Full article

Thin-film sensors are regarded as advanced technologies for in situ condition monitoring of components operating in harsh environments, such as aerospace engines. Nevertheless, these sensors encounter challenges due to the high-temperature oxidation of materials and intricate manufacturing processes. This paper presents a simple method to fabricate high temperature-resistant oxidized SiCN precursor and La(Ca)CrO₃ composite thin film temperature sensors by screen printing and air annealing. The developed sensor demonstrates a broad temperature response ranging from 200 °C to 1100 °C with negative temperature coefficients (NTC). It exhibits exceptional resistance to high-temperature oxidation and maintains performance stability. Notably, the sensor’s resistance changes by 3% after exposure to an 1100 °C air environment for 1 h. This oxidation resistance improvement surpasses the currently reported SiCN precursor thin-film sensors. Additionally, the sensor’s temperature coefficient of resistance (TCR) can reach up to −7900 ppm/°C at 200 °C. This strategy is expected to be used for other high-temperature thin-film sensors such as strain gauges, heat flux sensors, and thermocouples. There is great potential for applications in high-temperature field monitoring. Full article

Liquid phase exfoliation (LPE) has emerged as a promising method for the industrial-scale production of graphene. However, one of its critical steps, namely sonication, has faced challenges due to high power consumption and low efficiency, leading to limited applicability in industrial settings. This study introduces a novel, cost-effective microfluidic sonication device designed to significantly reduce power consumption while efficiently assisting the LPE process for graphene production. By coupling a capillary with a buzzer and applying an appropriate electric signal, simulation and particle tracing experiments reveal the generation of robust shear forces resulting from acoustic streaming and cavitation when the capillary end is immersed in the liquid. For the first time, the capillary-based sonication device was effectively utilized for graphene exfoliation in a DMF (N,N-Dimethylformamide) + NaOH liquid phase system. The SEM (Scanning Electron Microscope) and Raman characterization results corroborate the successful exfoliation of 100 nm with thicknesses below 10 nm graphene sheets from graphite flakes using this pioneering device. The values of $I_{2D}/I_G$ increase after processing, which suggests the exfoliation of graphite flakes into thinner graphene sheets. The vibration-based acoustofluidic effector represents a versatile and scalable miniature device, capable of being employed individually for small-batch production, thereby optimizing the utilization of raw 2D materials, particularly in experimental scenarios. Alternatively, it holds the potential for large-scale manufacturing through extensive parallelization, offering distinct advantages in terms of cost-efficiency and minimal power consumption. Full article

In this paper, we present numerical and experimental results on Localized Surface Plasmon Resonance (LSPR) refractive index (RI) sensitivity, Figure of Merit (FoM), and penetration depth (d_p) dependence on spherical gold nanoparticles (AuNPs) size, and the effects of AuNP dimer interparticle distance (d_s) studied numerically. These parameters were calculated and observed for d = 20, 40, 60, 80, and 100 nm diameter spherical AuNPs. Our investigation shows d = 60 nm AuNPs give the best FoM. The AuNP dimer interparticle distance can significantly influence the RI sensitivity. Therefore, the effect of distances between pairs of d = 20 nm and 60 nm AuNPs is shown. We discuss the importance of penetration depth information for AuNPs functionalized with aptamers for biosensing in the context of aptamer size. Full article

Atomic force microscopy (AFM) is a powerful tool for characterizing biological materials at the nanoscale utilizing the AFM nanoindentation method. When testing biological materials, spherical indenters are typically employed to reduce the possibility of damaging the sample. The accuracy of determining Young’s modulus depends, among other factors, on the calibration of the indenter, i.e., the determination of the tip radius. This paper demonstrates that the tip radius can be approximately calculated using a single force–indentation curve on an unknown, soft sample without performing any additional experimental calibration process. The proposed method is based on plotting a tangent line on the force indentation curve at the maximum indentation depth. Subsequently, using equations that relate the applied force, maximum indentation depth, and the tip radius, the calculation of the tip radius becomes trivial. It is significant to note that the method requires only a single force–indentation curve and does not necessitate knowledge of the sample’s Young’s modulus. Consequently, the determination of both the sample’s Young’s modulus and the tip radius can be performed simultaneously. Thus, the experimental effort is significantly reduced. The method was tested on 80 force–indentation curves obtained on an agarose gel, and the results were accurate. Full article

We propose a dynamically tunable ultra-broadband terahertz metamaterial absorber, which was based on graphene and vanadium oxide (VO₂) and numerically demonstrated. The excellent absorption bandwidth almost entirely greater than 90% was as wide as 6.35 THz from 2.30 to 8.65 THz under normal incidence. By changing the conductivity of VO₂ from 20 S/m to 3 × 10⁵ S/m, the absorption intensity could be dynamically tuned from 6% to 99%. The physical mechanism of the ultra-wideband absorption is discussed based on the interference cancelation, impedance matching theory, and field distributions, and the influences of the structural parameters on absorption are also discussed. According to the symmetric configuration, the absorption spectra of the considered polarizations were very close to each other, resulting in a polarization-insensitive structure. Such a tunable ultra-broadband absorber may have promising potential in the applications of modulating, cloaking, switching, and imaging technology. Full article

Personalized PageRank (PPR) is a widely used graph processing algorithm used to calculate the importance of source nodes in a graph. Generally, PPR is executed by using a high-performance microprocessor of a server, but it needs to be executed on edge devices to guarantee data privacy and network latency. However, since PPR has a variety of computation/memory characteristics that vary depending on the graph datasets, it causes performance/energy inefficiency when it is executed on edge devices with limited hardware resources. In this paper, we propose HedgeRank, a heterogeneity-aware, energy-efficient, partitioning technique of personalized PageRank at the edge. HedgeRank partitions the PPR subprocesses and allocates them to appropriate edge devices by considering their computation capability and energy efficiency. When combining low-power and high-performance edge devices, HedgeRank improves the execution time and energy consumption of PPR execution by up to 26.7% and 15.2% compared to the state-of-the-art PPR technique. Full article

In this study we investigate the optical properties of a 2D-gap surface plasmon metasurface composed of gold nanoblocks (nanoantennas) arranged in a metal–dielectric configuration. This novel structure demonstrates the capability of generating simultaneous multi-plasmonic resonances and offers tunability within the near-infrared domain. Through finite difference time domain (FDTD) simulations, we analyze the metasurface’s reflectance spectra for various lattice periods and identify two distinct dips with near-zero reflectance, indicative of resonant modes. Notably, the broader dip at 1150 nm exhibits consistent behavior across all lattice periodicities, attributed to a Fano-type hybridization mechanism originating from the overlap between localized surface plasmons (LSPs) of metallic nanoblocks and surface plasmon polaritons (SPPs) of the underlying metal layer. Additionally, we investigate the influence of dielectric gap thickness on the gap surface plasmon resonance and observe a blue shift for smaller gaps and a spectral red shift for gaps larger than 100 nm. The dispersion analysis of resonance wavelengths reveals an anticrossing region, indicating the hybridization of localized and propagating modes at wavelengths around 1080 nm with similar periodicities. The simplicity and tunability of our metasurface design hold promise for compact optical platforms based on reflection mode operation. Potential applications include multi-channel biosensors, second-harmonic generation, and multi-wavelength surface-enhanced spectroscopy. Full article

This study proposes an improved multi-scale permutation entropy complete ensemble empirical mode decomposition with adaptive noise (MPE-CEEMDAN) method based on adaptive Kalman filter (AKF) and grey wolf optimizer-least squares support vector machine (GWO-LSSVM). By establishing a temperature compensation model, the gyro temperature output signal is optimized and reconstructed, and a gyro output signal is obtained with better accuracy. Firstly, MPE-CEEMDAN is used to decompose the FOG output signal into several intrinsic mode functions (IMFs); then, the IMFs signal is divided into mixed noise, temperature drift, and other noise according to different frequencies. Secondly, the AKF method is used to denoise the mixed noise. Thirdly, in order to denoise the temperature drift, the fiber gyroscope temperature compensation model is established based on GWO-LSSVM, and the signal without temperature drift is obtained. Finally, the processed mixed noise, the processed temperature drift, the processed other noise, and the signal-dominated IMFs are reconstructed to acquire the improved output signal. The experimental results show that, by using the improved method, the output of a fiber optic gyroscope (FOG) ranging from −30 °C to 60 °C decreases, and the temperature drift dramatically declines. The factor of quantization noise (Q) reduces from 6.1269 × 10⁻³ to 1.0132 × 10⁻⁴, the factor of bias instability (B) reduces from 1.53 × 10⁻² to 1 × 10⁻³, and the factor of random walk of angular velocity (N) reduces from 7.8034 × 10⁻⁴ to 7.2110 × 10⁻⁶. The improved algorithm can be adopted to denoise the output signal of the FOG with higher accuracy. Full article

For NiTi alloys prepared by the Laser Powder Bed Fusion (LPBF), changes in the building directions will directly change the preferred orientation and thus directly affect the smart properties, such as superelasticity, as well as change the distribution state of defects and impurity elements to affect the phase transformation behaviour, which in turn affects the smart properties at different temperatures. In this study, the relationship between impurity elements, the building directions, and functional properties; the effects of building directions on the crystallographic anisotropy; phase composition; superelastic properties; microhardness; geometrically necessary dislocation (GND) density; and impurity element content of NiTi SMAs fabricated by LPBF were systematically studied. Three building directions measured from the substrate, namely, 0°, 45° and 90°, were selected, and three sets of cylindrical samples were fabricated with the same process parameters. Along the building direction, a strong <100>//vertical direction (VD) texture was formed for all the samples. Because of the difference in transformation temperature, when tested at 15 °C, the sample with the 45° orientation possessed the highest strain recovery of 3.2%. When tested at the austenite phase transformation finish temperature (Af)+10 °C, the 90° sample had the highest strain recovery of 5.83% and a strain recovery rate of 83.3%. The sample with the 90° orientation presented the highest microhardness, which was attributed to its high dislocation density. Meanwhile, different building directions had an effect on the contents of O, C, and N impurity elements, which affected the transformation temperature by changing the Ni/Ti ratio. This study innovatively studied the impurity element content and GND densities of compressive samples with three building directions, providing theoretical guidance for LPBFed NiTi SMA structural parts. Full article

Single-cell microrobots are new microartificial devices that use a combination of single cells and artificial devices, with the advantages of small size, easy degradation and ease of manufacture. With externally driven strategies such as light fields, sound fields and magnetic fields, microrobots are able to carry out precise micromanipulations and movements in complex microenvironments. Therefore, single-cell microrobots have received more and more attention and have been greatly developed in recent years. In this paper, we review the main classifications, control methods and recent advances in the field of single-cell microrobot applications. First, different types of robots, such as cell-based microrobots, bacteria-based microrobots, algae-based microrobots, etc., and their design strategies and fabrication processes are discussed separately. Next, three types of external field-driven technologies, optical, acoustic and magnetic, are presented and operations realized in vivo and in vitro by applying these three technologies are described. Subsequently, the results achieved by these robots in the fields of precise delivery, minimally invasive therapy are analyzed. Finally, a short summary is given and current challenges and future work on microbial-based robotics are discussed. Full article

In this paper, the performance of Cu-(In,Ga)-S₂ (CIGS₂) solar cells with adjusting composite [Cu]/([Ga] + [In]) (CGI)-ratio absorber was explored and compared through an improved three-stage co-evaporation technique. For co-evaporating CIGS₂ absorber as a less toxic alternative to Cd-containing film, we analyzed the effect of the CGI-ratio stoichiometry and crystallinity, and explored its opto-electric sensing characteristic of individual solar cell. The results of this research signified the potential of high-performance CIGS₂-absorption solar cells for photovoltaic (PV)-module industrial applications. For the optimal CIGS₂-absorption film (CGI = 0.95), the Raman main-phase signal (A1) falls at 291 cm⁻¹, which was excited by the 532 nm line of Ar⁺-laser. Using photo-luminescence (PL) spectroscopy, the corresponding main-peak bandgaps measured was 1.59 eV at the same CGI-ratio film. Meanwhile, the best conversion efficiency (η = 3.212%) and the average external quantum efficiency (EQE = 51.1% in the visible-wavelength region) of photo-electric properties were achieved for the developed CIGS₂-solar cells (CGI = 0.95). The discoveries of this CIGS₂-absorption PV research provided a new scientific understanding of solar cells. Moreover, this research undeniably contributes to a major advancement towards practical PV-module applications and can help more to build an eco-friendly community. Full article

In situ TEM mechanical stages based on micro-electromechanical systems (MEMS) have developed rapidly over recent decades. However, image-based quantification of MEMS mechanical stages suffers from the trade-off between spatial and temporal resolutions. Here, by taking in situ TEM nanoindentation as an example, we developed a novel method for image-based quantified in situ TEM mechanical tests with both high spatial and temporal resolutions. A reference beam was introduced to the close vicinity of the indenter–sample region. By arranging the indenter, the sample, and the reference beam in a micron-sized area, the indentation depth and load can be directly and dynamically acquired from the relative motion of markers on the three components, while observing the indentation process at a relatively high magnification. No alteration of viewing area is involved throughout the process. Therefore, no deformation events will be missed, and the collection rate of quantification data can be raised significantly. Full article

Enhancing the output power of triboelectric nanogenerators (TENGs) requires the creation of micro or nano-features on polymeric triboelectric surfaces to increase the TENGs’ effective contact area and, therefore, output power. We deploy a novel bench-top fabrication method called dynamic Scanning Probe Lithography (d-SPL) to fabricate massive arrays of uniform 1 cm long and 2.5 µm wide nano-features comprising a 600 nm deep groove (NG) and a 600 nm high triangular prism (NTP). The method creates both features simultaneously in the polymeric surface, thereby doubling the structured surface area. Six thousand pairs of NGs and NTPs were patterned on a $6\times 5$ cm${}^2$ PMMA substrate. It was then used as a mold to structure the surface of a 200 µm thick Polydimethylsiloxane (PDMS) layer. We show that the output power of the nano-structured TENG is significantly more than that of a TENG using flat PDMS films, at 12.2 mW compared to 2.2 mW, under the same operating conditions (a base acceleration amplitude of 0.8 g). Full article

Organic-inorganic perovskites hold great promise as optoelectronic semiconductors for pure color light emitting and photovoltaic devices. However, challenges persist regarding their photostability and chemical stability, which limit their extensive applications. This paper investigates the laser radiation hardening and self-healing-induced properties of aged MAPbBr₃ perovskites encapsulated in NiO nanotubes (MAPbBr₃@NiO) using photoluminescence (PL) and fluorescence lifetime imaging (FLIM). After deliberately subjecting the MAPbBr₃@ NiO to atmospheric conditions for two years, the sample remains remarkably stable. It exhibits no changes in PL wavelength during UV laser irradiation and self-healing. Furthermore, exposure to UV light at 375 nm enhances the PL of the self-healed MAPbBr₃@NiO. FLIM analysis sheds light on the mechanism behind photodegradation, self-healing, and PL enhancement. The results indicate the involvement of many carrier-trapping states with low lifetime events and an increase in peak lifetime after self-healing. The formation of trapping states at the perovskite/nanotube interface is discussed and tested. This study provides new insights into the dynamics of photo-carriers during photodegradation and self-healing in organic-inorganic perovskites. Full article

High in reliability, multi in function, and strong in tracking and detecting, active phased array antennas have been widely applied in radar systems. Heat dissipation is a major technological barrier preventing the realization of next-generation high-performance phased array antennas. As a result of the advancement of miniaturization and the integration of microelectronics technology, the study and development of embedded direct cooling or heat dissipation has significantly enhanced the heat dissipation effect. In this paper, a novel swept-back fishnet-embedded microchannel topology (SBFEMCT) is designed, and various microchannel models with different fishnet runner mesh density ratios and different fishnet runner layers are established to characterize the chip Tmax, runner Pmax, and Vmax and analyze the thermal effect of SBFEMCT under these two operating conditions. The Pmax is reduced to 72.37% and 57.12% of the original at mesh density ratios of 0.5, 0.25, and 0.125, respectively. The maximum temperature reduction figures are average with little change in maximum velocity and a small increase in maximum pressure drop across the number of fishnet runner layers from 0 to 4. This paper provides a study of the latest embedded thermal dissipation from the dimension of a single chip to provide a certain degree of new ideas and references for solving the thermal technology bottleneck of next-generation high-performance phased array antennas. Full article

A VCF-based mode-matching micromachine-optimized tuning fork gyroscope is proposed to not only maximize the scale factor of the device, but also avoid use of an additional quadrature-nulling loop to prevent structure complexity, pick-up electrode occupation, and coupling with a mode-matching loop. In detail, a mode-matching, closed-loop system without a quadrature-nulling loop is established, and the corresponding convergence and matching error are quantitatively analyzed. The optimal straight beam of the gyro structure is then modeled to significantly reduce the quadrature coupling. The test results show that the frequency split is narrowed from 20 Hz to 0.014 Hz. The scale factor is improved 20.6 times and the bias instability (BI) is suppressed 3.28 times. The observed matching accuracy demonstrates that a mode matching system without a quadrature suppression loop is feasible and that the proposed device represents a competitive design for a mode-matching gyroscope. Full article